SMC XLA40-M9NLA KF40 High Vacuum Angle Valve with Sensor

Brand: SMC
Product Code: 131010109
Availability: In Stock

Price: US$384.35

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High Vacuum Angle Valve from SMC

Normally closed, Bellow sealed, Air-operated type,

With 2 auto switches: Open & close positions are detected

Temperature range: 5 to 60°C
Pressure range: 1 x 10^-8 mbar to 1 bar (abs.)
Bellows-sealed (Spring Bellow 316L)
Valve plate seal: FPM (fluororubber)
Leakage rate: 1.3 x 10^-9 mbar l/s (without permeation)
Cycles to first maintenance: 2,000,000
Cleaned and packaged suitable for cleanroom use
Pneumatics: Normally closed
Visible position indicator, equipped for position sender (see SMC accessories)
Options: Other seal materials; aluminum housing: Heater to prevent vapor condensation, double-action pneumatics, integral control valve

High Vacuum Valve
Flange Size	KF40
Valve Type	Normally Closed (Pressurized to open, Spring sealed)
Fluid	Non-corrosive gas
Operating Temperature C	5 to 60
Operating Pressure Pa (Torr)	Atmospheric Pressure to 1 x 10-6 (760 to 7.5 x 10-9)
Conductance	45
Actuation Port Size	Rc (PT) 1/8