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High Vacuum Valve | |
Flange Size | KF16 |
Valve Type | Normally closed (Pressurized to open, Spring seal) |
Fluid | Non-corrosive gas |
Operating Temperature C | 5 to 60 |
Operating Pressure Pa (Torr) | Atmospheric pressure to 1 x 10-6 (760 to 7.5 x 10-9) |
Conductance | 5 |
Actuation Port Size | M5 |